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URN etd-0114108-121101 Statistics This thesis had been viewed 3271 times. Download 1399 times. Author Chi-Kang Chan Author's Email Address No Public. Department Mechanical Engineering Year 2007 Semester 1 Degree Ph.D. Type of Document Doctoral Dissertation Language English Page Count 141 Title DESIGN AND FABRICATION OF MICRO-DEVICES BY INTEGRATING COMPUTER-AIDED ANALYSIS AND OPTIMIZATION METHOD Keyword SCGM Optimization MEMS Microactuator Millimeter-scale channel Millimeter-scale channel Microactuator MEMS Optimization SCGM Abstract The aim of this thesis is to develop an approach that integrating computer-aided analysis and optimization method, and then apply the approach to design and optimize millimeter or micrometer-scale devices, including the millimeter-scale air heating channel and the electro-thermal microactuator. The optimization framework consists of a grid generator, a direct solver, and numerical optimizer. Herein, the Simplified Conjugate-Gradient Method (SCGM) is employed to build the optimizer and the general-purpose finite element code ANSYS is used to be the grid generator and direct solver. Among them, an interface program that integrating the optimizer and ANSYS is developed.
In application of the approach to the optimization of the millimeter-scale air heating channel, two-dimensional and three-dimensional channels are investigated. The proper shape function is determined and the redistribution method is employed to construct the irregular wall shape profiles. Optimization for the wall shape profile of a millimeter-scale air-heating channel has been performed to enhance the heat transfer and reduce the pressure drop.
In application of the approach to the optimization of the electro-thermal microactuator, the conventional design is analyzed and fabricated. Meanwhile, the performance test is investigated. To improve the performance, the modifications of the conventional design are attempted and the superior one is selected to be optimized. Finally, optimization of microactuator for obtaining a large bending displacement with a low temperature has been performed.
Advisor Committee Chin-Hsiang Cheng - advisor
Guang-Jer Lai - advisor
Chyi-Yeou Soong - co-chair
Han-Taw Chen - co-chair
Long-Jyi Yeh - co-chair
Wei-Mon Yan - co-chair
Files Date of Defense 2008-01-04 Date of Submission 2008-01-17