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URN etd-0515118-134114 Statistics This thesis had been viewed 133 times. Download 0 times. Author Tsung-Han Hsieh Author's Email Address No Public. Department Materials Engineering Year 2017 Semester 2 Degree Ph.D. Type of Document Doctoral Dissertation Language zh-TW.Big5 Chinese Page Count 121 Title STUDY ON THE PROPERTIES OF (AlCrNbSiTiV)N THIN FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING BASED ON GREY-TAGUCHI METHOD Keyword cutting experiment mechanical properties grey-Taguchi method deposition parameters high-entropy alloy(HEA) high-entropy alloy(HEA) deposition parameters grey-Taguchi method mechanical properties cutting experiment Abstract High-entropy alloy (AlCrNbSiTiV)N nitride thin films have been prepared in this study by direct current (DC) reactive magnetron sputtering with AlCrNbSiTiV alloy target. For the robust design of high quality and low cost an effective method to optimize parameters (DC power, substrate temperature, N2/(N2+Ar) ratio, and substrate bias) for the deposition process with multiple performance characteristics, using the Taguchi method combined with grey relational analysis. An orthogonal array (L9 34), the signal-to-noise ratio, analysis of variance and grey relational analysis are together used to analyze the effect of the deposition parameters. These coated films are analyzed using α-step, field emission scanning electron microscopy, X-ray energy dispersive spectrometer, transmission electron microscopy, atomic force microscopy, field emission election probe micro-analyzer, X-ray diffraction, surface roughness tester, vision measurement, micro hardness tester, nano-indenter, potentiostat, and Rockwell hardness tester.
In the confirmation runs of industrial application, with grey relational analysis (DC power: 150W, substrate temperature: 300oC, N2/(N2+Ar) ratio: 10%, substrate bias: -80V), the improvement compared with the glass in friction coefficient is 33%, in corrosion current is 30%, in hardness is 29%, in elastic modulus is -22%, in H/E is 57%, in H3/E2 is 225%. In the confirmation runs of cutting experiment, with grey relational analysis (DC power: 150W, substrate temperature: 250oC, N2/(N2+Ar) ratio: 20%, substrate bias: -120V), the improvement compared with the cermet tool in flank wear is 6.5%, in surface roughness is 7.7% and shows good adhesion strength in Rockwell adhesion analysis, respectively.
This study also found that grey relational analysis can reconstruct and verify the Taguchi experiment in the industrial applications. It was found in the cutting experiment that Taguchi experiments can be modified and optimized.
Advisor Committee Cheng-Hsun Hsu - advisor
Chung-Kuei Lin - co-chair
Ko-Shao Chen - co-chair
Mu-Rong Yang - co-chair
Wei-Yu Ho - co-chair
Files Date of Defense 2018-05-04 Date of Submission 2018-05-15