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URN etd-0619108-151355 Statistics This thesis had been viewed 3235 times. Download 2183 times. Author Chieh-Hsiang Chang Author's Email Address email@example.com Department Chemical Engineering Year 2007 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 105 Title RESEARCH OF TRIBOLOGY AND PROPERTIES OF DLC DOPING FLUORINE BY HV-I/S CVD Keyword Tribology Diamond Like Carbon film Diamond Like Carbon film Tribology Abstract DLC(Diamond Like Carbon) film is a kind of film with characteristics of high hardness, low friction and high chemical stability. There is important application on industry. Mixing other elements in DLC film, for example, metal or gas, can enhance the adhesive force and reduce the friction, etc. that make DLC film have different characteristics and good applicability.
This research uses the methode of HV-I/S CVD (High Voltage Ion Source Chemical Vapor Deposition) to codeposit the fluorine element and nitrogen element separately and produce DLC film by introducing the CF4 and N2 gases respectively. Using Micro-Raman spectroscopy to analyse the content of SP³、SP² and the change. To investigate the roughness of the surface of the film by using Atomic Force Microscopy. The Vickers micro-hardness is used for measure the hardness of film to realize the hardness promotion of the substrate. Finally, the Tribometer ball on disk is used to measure the friction and its life time, for finding the tribology properties of DLC. A new useful DLC film with low friction has been obtained.
Advisor Committee Hsing-Hsiang Shih - advisor
Ien-Hui Chen - co-chair
Shyan-Kay Jou - co-chair
Files Date of Defense 2008-05-30 Date of Submission 2008-06-20