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The current date is 2018-02-23
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URN etd-0703106-150244 Statistics This thesis had been viewed 2191 times. Download 20 times. Author Hsiu-Chia Lin Author's Email Address No Public. Department Materials Engineering Year 2005 Semester 2 Degree Master Type of Document Master's Thesis Language English Page Count 84 Title Fabrication of high sensitive and
water- resistive humidity sensor
by phenol formaldehyde resin and plasma treatment
Keyword humidity sensor phenol formaldehyde resin plasma treatment plasma treatment phenol formaldehyde resin humidity sensor Abstract For fabricating the excellent water-resistant humidity sensitive layer, the organic humidity sensitive monomer mixed with phenol-formaldehyde resin solution was successfully prepared by spin-coating on comb-shaped electrodes. The spin-coating sensitive layers were exposed to UV-light to induce grafting and curing reaction. Mixing with the resin solution cam improve the adhesion between the polymerized film and electrode substrate. Unfortunately, it tends to solve in water because the adhesion between the copolymerized monomer and electrode substrate is poor. When we deposit hydrophobic HMDSZ (hexamethyldisilazane) plasma film onto the comb-shaped electrodes as an interface before grafting, the plasma treatment can provide the free radicals that can bond with humidity-sensitive polymer strongly by graft reaction, therefore the device has a good water resistivity.
The impedance can very by 4 order between humidity of35~95%. Temperature dependence, hystersis, response time, water durability under various environments were also investigated.
Advisor Committee Ko-Shao Chen - advisor
Mu-Rong Yang - co-chair
T.P.Tang - co-chair
Files Date of Defense 2006-06-22 Date of Submission 2006-07-03