Announcement for Downloading full text filePlease respect the Copyright Act.
All digital full text dissertation and theses from this website are authorized the copyright owners. These copyrighted full-text dissertation and theses can be only used for academic, research and non-commercial purposes. Users of this website can search, read, and print for personal usage. In respect of the Copyright Act of the Republic of China, please do not reproduce, distribute, change, or edit the content of these dissertations and theses without any permission. Please do not create any work based upon a pre-existing work by reproduction, Adaptation, Distribution or other means.
URN etd-0708104-143704 Statistics This thesis had been viewed 2700 times. Download 1604 times. Author Ming -Gang Author's Email Address No Public. Department Materials Engineering Year 2003 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 90 Title Pulsed Laser Deposition of 0.07Pb(Mn1/3Nb2/3)O3-0.468PbZrO3-0.462PbTiO3 Piezoelectric Ceramics Keyword Pulsed Laser Deposition Pulsed Laser Deposition Abstract In this study, the zirconia with addition of Y2O3 4mol%, 3mol%, and 2mol%, were deposited on the silicon (100) wafer by PLD at different deposition temperatures. The structure of the as-deposited film was a cubic phase with (111) and/or (200) preferred orientation. After annealing at 1000 ℃ for 2 hours in the air, the cubic (200) was split into two peaks which were identified as the tetragonal (200) and (002). For YSZ-4mole%, the cubic (111) preferred orientation was preserved after annealing. The annealed YSZ films were chosen as the buffer layer for further deposition of the 0.07(Pb(Mn1/3Nb2/3))O3 - 0.468(PbZrO3) - 0.462(PbTiO3) (PMnN-PZ-PT) films. The structures of the as-deposited films were identified as pyrochlore-type Pb2Ti2O6 (222) and/or (400) preferred orientation. The perovskite structure was not formed in the as-deposited PMnN-PZ-PT films until it was annealed at 800 ℃ for 2 hours in the air. It was found that the pyrochlore-type structure was appeared no matter with the deposition time. The perovskite form was also found after 3 hours of deposition Advisor Committee Wan-Yi Wei - advisor
Hur-Lon Lin - co-chair
Files Date of Defense 2004-06-24 Date of Submission 2004-07-08