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URN etd-0722105-145229 Statistics This thesis had been viewed 2784 times. Download 1583 times. Author Shin Lee Author's Email Address No Public. Department Materials Engineering Year 2004 Semester 2 Degree Master Type of Document Master's Thesis Language English Page Count 78 Title Optical properties of the amorphous Al2O3-TiO2 composite film for H-T APSM at 193nm wavelength Keyword H-T APSM H-T APSM Abstract Amorphous (Al2O3)x-(TiO2)1-x composite films are prepared using R.F. unbalanced magnetron sputtering in an atmosphere of argon and oxygen at room temperature. (Al2O3)x-(TiO2)1-x composite films are completely oxidized using an O2/Ar flow rate ratio of 2.0. The optical constants of (Al2O3)x-(TiO2)1-x composite films are linearly dependent on Al2O3 mole fraction in (Al2O3)x-(TiO2)1-x composite film. By tuning the Al2O3 mole fraction in the (Al2O3)x-(TiO2)1-x composite films, the optical constants can meet the optical requirements for a high transmittance attenuated phase shift mask (HT-APSM) blank. It can be found that the Al2O3 mole fraction in (Al2O3)x-(TiO2)1-x composite films which meet the optical requirements at 193 nm wavelength of an HT-APSM blank in ArF lithography is calculated to be between 78% and 86%. The reflectance of less than 10% at 193 nm wavelength and the inspection transmittance of less than 50% at 257 nm wavelength meet two key optical requirements for an HT-APSM blank. In order to obtain an HT-APSM blank with optimized transmittance of 20%, one Al2O3-TiO2 composite film is fabricated and its optical properties meet the optimized optical requirements for ArF –line HT-APSM blanks. All the films meet the requirements of surface roughness after the chemical durability test and the adhesion test. Therefore, monolayer Al2O3-TiO2 composite film is a new candidate material for HT-APSM blanks to be utilized to design fine pattern with dimensions as small 65nm. Advisor Committee Chi-Yuan Huang - advisor
Fu-Der Lai - co-chair
Mu-Rong Yang - co-chair
Files Date of Defense 2005-07-11 Date of Submission 2005-07-22