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URN etd-0726104-165002 Statistics This thesis had been viewed 3077 times. Download 1128 times. Author Pei-Yu Liu Author's Email Address firstname.lastname@example.org Department Materials Engineering Year 2003 Semester 2 Degree Master Type of Document Master's Thesis Language English Page Count 104 Title The Preparation of Organic containing Titanium Oxide Film by Cold Plasma and Its Photocatalytic Hydrophilic Property Keyword plasma photocatalytic photocatalytic plasma Abstract Titanium dioxide (TiO2) is the well-known photocatalyst material; there is a wide range of potential applications of TiO2 for the purification of environmental air and water, deodorization, and antibacterial and self-cleaning coating. In order to develop a low temperature process; the substrates were pre-treated by oxygen plasma activated procedure, and then spin coating of Ti (OR) 4 precursor solution was carried out to prepare Ti-containing organic films. Finally, O2 plasma was employed to decompose organic compounds and oxidize Ti to form oxides. The effect of power, pressure, and post oxygen plasma treatment on the chemical structure and composition of the film will be investigated.
PET and Si-wafer were used as substrates. O2 plasma pretreatment can improve the wettability. From the observation of AFM and SEM, the substrates treated by O2 plasma develop more roughness and hydrophilic surface. Plasma pretreated substrates improve adhesion of Ti (OR) 4 precursor. Oxygen plasma post treatment can oxidize the organic compounds to form titanium oxide carbon this surface subsequently. From the analysis IR and ESCA, we can observe that O2 plasma treatment decrease –CH bond and increase Ti-O, C-O bonds. Their surface hydrophilic was enhanced by UV-irradiation, the degree of water contact angle decreased from 60 ?to 10?.
Advisor Committee Ko-Shao Chen - advisor
Mu-Rong Yang - co-chair
Ta-Chin Wei - co-chair
Files Date of Defense 2004-06-21 Date of Submission 2004-07-26