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Title page for etd-0805113-175041


URN etd-0805113-175041 Statistics This thesis had been viewed 1095 times. Download 0 times.
Author Li-Hong Zhang
Author's Email Address No Public.
Department Electro-Optical Engineering
Year 2012 Semester 2
Degree Master Type of Document Master's Thesis
Language zh-TW.Big5 Chinese Page Count 85
Title Characteristics of ITO and AZO double thin films on flexible plastic substrates deposited by RF magnetron sputtering
Keyword
  • PET
  • ITO
  • transparent conductive film
  • AZO
  • AZO
  • transparent conductive film
  • ITO
  • PET
  • Abstract Transparent conductive film has a good optical characteristics, can be used in many optical fields. This study uses RF magnetron sputtering deposited ITO and AZO layer film on a plastic substrate, and fixed a total thickness of 300 nm, to 50 nm for the range of different thickness are stacked ITO and AZO films, to explore the photoelectric characteristics affected.
    By RF magnetron sputtering at room temperature and then, with a total thickness of 300 nm, and then the plastic substrate to ITO film as substrate, power 40 W, process pressure 3 mtorr, argon gas flow 10 sccm, the thickness of 250 nm and then coated with AZO thin films , power 50 W, made of pressure 3 mtorr, argon gas flow 10 sccm, the thickness of 50 nm do stack, get the lowest resistivity of 4.8 × 10-4, sheet resistance 16Ω / □, carrier concentration of 6.8 × 1020 cm3 and carrier mobility of 1.7 × 10 +1 cm2/Vs, visible light transmittance of 91.4% in average roughness Rms = 4.24 nm, we found that you can get the best optical characteristics of the transparent conductive film.
    Advisor Committee
  • Wen-Ching Shih - advisor
  • Files indicate in-campus access at 5 years and off-campus not accessible
    Date of Defense 2013-07-26 Date of Submission 2013-08-06


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