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Title page for etd-0812115-142937


URN etd-0812115-142937 Statistics This thesis had been viewed 633 times. Download 0 times.
Author Bo-xuan Chen
Author's Email Address No Public.
Department Electro-Optical Engineering
Year 2014 Semester 2
Degree Master Type of Document Master's Thesis
Language zh-TW.Big5 Chinese Page Count 106
Title Fabrication and application of field emitter arrays
Keyword
  • triode
  • carbon nanotube
  • Field emission arrays
  • Field emission arrays
  • carbon nanotube
  • triode
  • Abstract This paper is mainly in studying the use of excellent physical property of carbon nanotube to produce plain light emitting source; however, high density carbon nanotube has higher shielding effect, so we produced array area by photolithography, and by field emitting characteristics measurement, it is found the gap of array area is wider than 800 μm, and the gap between anode and cathode is 275 μm, and under 2.03 V/μm electric field strength, 11.83 μA/cm2 ampere current density. In bipolar array structure, it is helpful in lowering shielding effect.
    Also growing carbon nanotube on triode structure emitting element through lithography laboratory rotating coating, exposure and development defined array porosity procedure and successfully use plasma treatment system to remove molybdenum layer, wet etching to remove silicone dioxide and selective silicone substrate pores and grow carbon nanotube in the pores of array under triode structure array pores of Mo/SiO2/Si. Thereafter, compare the diode and triode field emitting characteristics. In the field emitting characteristics measuring, it can be found the gate structure in triode manner is helpful to the elevating of electron in field emitting structure.
       Later in triode structure, when applying 5000 V on anode and 0-500 V on gate, through control of electron beam of gate, it can attain the application of light adjustment and switch.
    Advisor Committee
  • Wen-Ching Shih - advisor
  • Files indicate in-campus access at 3 years and off-campus access at 5 years
    Date of Defense 2015-07-01 Date of Submission 2015-08-12


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