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Title page for etd-0820104-094207


URN etd-0820104-094207 Statistics This thesis had been viewed 2065 times. Download 13 times.
Author Che-Wei Hsu
Author's Email Address g9101003@mail.ttu.edu.tw
Department Mechanical Engineering
Year 2003 Semester 2
Degree Master Type of Document Master's Thesis
Language English Page Count 117
Title Design and Fabrication of Microfluidic Devices – Micro Actuator and Micro Mixer
Keyword
  • PDMS
  • Micromixer
  • Microfluidics
  • Microactuator
  • Bi-metal Effect
  • Bi-metal Effect
  • Microactuator
  • Microfluidics
  • Micromixer
  • PDMS
  • Abstract This thesis is aimed at fabrication of microfluidics, including microactuator and micromixer. Firstly, a semiconductor electro-thermal microactuator is manufacture with the semiconductor technology. The microactuator is able to produce actuation due to a bi-metal structure. Make use of existing equipment to manufacture and test the microactuator devices that it’s in order to reach the purpose which develop fabrication easy and drive low energy. Microactuator device have succeeded to manufacture and have actuation result at present. Secondly, a micromixer is manufacture with the PDMS technology. Then we designed several kinds of geometry micromixer to observe mixing result. Utilize this experiment to let us understand the fluid characteristic under microscale. Expect to design the simple structure and optimum mixing result of micromixer devices through obtains the fluid flow mechanism under microscale.
    Advisor Committee
  • Chin-Hsiang Cheng - advisor
  • Chong-Sin Wu - co-chair
  • Ping-Hei Chen - co-chair
  • Tsung-Chieh Cheng - co-chair
  • Files indicate in-campus access only
    Date of Defense 2004-07-08 Date of Submission 2004-08-20


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