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Title page for etd-0821109-145753


URN etd-0821109-145753 Statistics This thesis had been viewed 4029 times. Download 1381 times.
Author Chen-John Ming
Author's Email Address No Public.
Department Mechanical Engineering
Year 2008 Semester 2
Degree Master Type of Document Master's Thesis
Language zh-TW.Big5 Chinese Page Count 80
Title The application of textured surface as antireflection surface on solar cells
Keyword
  • Etching.
  • Anti-reflectivity structure
  • Anti-reflectivity
  • Solar cell ;Lift off
  • Solar cell ;Lift off
  • Anti-reflectivity
  • Anti-reflectivity structure
  • Etching.
  • Abstract ABSTRACT
    The new process its purpose was to modify the reflectivity of solar cell. That used pattern and etching simply to change the microstructure of the surface in wafer (solar cell). That process reduced the reflectivity when the light lighted the surface of wafer。The light energy was keep in the wafer and the light energy exchange to electro energy increase。The process was to spin coating HMDS to wafer (solar cell), and then attached the photoresists to surface. To exposure and autoradiography the wafer .We got the wafer with pattern and etched the wafer. The open area and line size also changed the reflectivity of wafer. That also was the purpose how to get the best anti-reflectivity.
       In this research,the first phase was bare wafer etching,the second phase was pattern wafer etching,the third phase was the comparison and discussion in the bare wafer etching and pattern wafer etching, the fourth phase is discuss the open area and line size, the fifth phase was opportunity of etching. At last, we discussed the result in these phases.
    Advisor Committee
  • Wei-Che Hung - advisor
  • Cheng-Min Hsing - co-chair
  • Tai-Fong Cheng - co-chair
  • Files indicate access worldwide
    Date of Defense 2009-07-29 Date of Submission 2009-08-24


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