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URN etd-0822111-021641 Statistics This thesis had been viewed 1578 times. Download 75 times. Author Yi-Fan huang Author's Email Address No Public. Department Electro-Optical Engineering Year 2010 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 89 Title Enhancement Of Characteristics Of ZnO Thin Film Surface Acoustic Wave Devices By Depositing Al2O3
Keyword Al2O3 ZnO SAW SAW ZnO Al2O3 Abstract The communication elements usually require high frequency and low temperature coefficient. So we try to get higher frequency by deposing Al2O3 films on our SAW device. We also will use Al2O3 layer to guide the outside heat to avoid temperature effect on our SAW devices.In this study , we use Al2O3/IDT/ZnO/Al2O3/Glass structure to accomplish our goal. We also change the thickness of Al2O3 layer to observe the frequency response and the temperature coefficient by network analyzer. Advisor Committee Mu-Shiang Wu - advisor
Chi-Tsung Lo - co-chair
Wen-Chin Shih - co-chair
Files Date of Defense 2011-07-27 Date of Submission 2011-08-24