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Title page for etd-0822111-021641


URN etd-0822111-021641 Statistics This thesis had been viewed 1551 times. Download 75 times.
Author Yi-Fan huang
Author's Email Address No Public.
Department Electro-Optical Engineering
Year 2010 Semester 2
Degree Master Type of Document Master's Thesis
Language zh-TW.Big5 Chinese Page Count 89
Title Enhancement Of Characteristics Of ZnO Thin Film Surface Acoustic Wave Devices By Depositing Al2O3
Thin Film
Keyword
  • Al2O3
  • ZnO
  • SAW
  • SAW
  • ZnO
  • Al2O3
  • Abstract The communication elements usually require high frequency and low temperature coefficient. So we try to get higher frequency by deposing Al2O3 films on our SAW device. We also will use Al2O3 layer to guide the outside heat to avoid temperature effect on our SAW devices.In this study , we use Al2O3/IDT/ZnO/Al2O3/Glass structure to accomplish our goal. We also change the thickness of Al2O3 layer to observe the frequency response and the temperature coefficient by network analyzer.
    Advisor Committee
  • Mu-Shiang Wu - advisor
  • Chi-Tsung Lo - co-chair
  • Wen-Chin Shih - co-chair
  • Files indicate in-campus access at 5 years and off-campus access at 5 years
    Date of Defense 2011-07-27 Date of Submission 2011-08-24


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