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URN etd-0825107-034525 Statistics This thesis had been viewed 3890 times. Download 4420 times. Author Jhih-ren Shih Author's Email Address No Public. Department Materials Engineering Year 2006 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 80 Title Influence of modulated RF silane plasma on the gap states and stability
of the intrinsic layer of a-Si:H Solar Cell
Keyword solar cell solar cell Abstract Amorphous silicon (a-Si) thin film with a short range order has been extensively used in semiconductors and thin film solar cells owing to its simple manipulation processes and low cost. However, the transition efficiency of the amorphous silicon solar cell is much lower than the crystalline silicon solar cell due to the much higher structure defects. It has been an important issue on how to improve the transition efficiency of amorphous silicon solar cells effectively.
Hydrogenated amorphous silicon (a-Si:H) intrinsic thin films and solar cells were prepared by radio-frequency plasma enhanced chemical vapor deposition (PECVD) on Corning 1737F glasses, silicon wafers and ITO glasses respectively. The structure of the solar cell is glass/ITO/pii'n/Al. Different pulse modulation plasma manipulation processes were employed in this study. The relationships among the fabrication parameters( modulation frequency) of intrinsic layer, the electrical performance and optical properties of solar cells were investigated. The associated experiments involved RAMAN, FTIR, AFM, SE, UV-VIS, and I-V measurements. It can seen that the microstructure fraction ratio, photon current and photon to dark conductivity ratio were improved by different pulse modulate frequency due to the decrease of the total hydrogen content and SiH2 bonding in intrinsic thin films. The improvement of the intrinsic layer properties (i.e., less defects) increases the short current and transition efficiency and make the solar cells as ideal diodes with lower ideal factors.
Advisor Committee Mu-rong Yang - advisor
Hsi-lien Hsiao - co-chair
Yu-long Jiang - co-chair
Files Date of Defense 2007-07-26 Date of Submission 2007-08-25