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URN etd-0827108-191848 Statistics This thesis had been viewed 2628 times. Download 1477 times. Author Chung-Tai Sung Author's Email Address No Public. Department Materials Engineering Year 2007 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 73 Title Effect of focused ion beam post-treatment on the diamond-like carbon films synthesized by RF plasma enhanced chemical vapor deposition Keyword ITO DLC pre-treatment H2 FIB FIB H2 pre-treatment DLC ITO Abstract Diamond-like carbon (DLC) films were deposited on both ITO glass and Si substrates by RF plasma enhanced chemical vapor deposition and the effects of post-treatment of focused ion beam (FIB) on the structure and properties of DLC films were investigated. Before the deposition of DLC films, the substrate was pre-treatment with Ar or H2 plasma at different powers. For the FIB post-treatment, the effects of incidence energy, beam size, treatment time and incidence angle were studied. Surface roughness, morphology and structure of DLC films after various treatments were measured.
Experiments of plasma pre-treatment indicate that the surface roughness and resistivity of ITO glass did not show obvious change when the power of H2 plasma was lower than 40W. However, significant increases of surface roughness and resistivity were observed when the power was larger than 40W, indicating that the ITO coating was damaged. For the FIB post- treatment of DLC deposited on ITO substrate, no obvious changes of the surface roughness, G band position and ID/IG ratio were found for the low incidence energy (15kV). However, for the high incidence energy (30kV) with a small beam size (22nm), ID/IG ratio increased but the surface roughness remained relatively constant. For the high incidence energy (30kV) with a large beam size (750nm and 2000nm), surface roughness was found to increase only at the beam size of 750nm. For the DLC deposited on Si substrate, the ID/IG ratio was found to increase after FIB post-treatment with high incidence energy (30kV), large beam size (750nm and 2000nm) and increased scan number (10 scans).
Advisor Committee Shinn-Shyong Tzeng - advisor
Jhe-hong Wei - co-chair
Jyong-syun Syu - co-chair
Files Date of Defense 2008-07-30 Date of Submission 2008-08-28