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URN etd-0829105-162600 Statistics This thesis had been viewed 3712 times. Download 1708 times. Author Tai-wei Su Author's Email Address email@example.com Department Electro-Optical Engineering Year 2004 Semester 2 Degree Master Type of Document Master's Thesis Language English Page Count 60 Title Study of MgO Thin Film Grown by RF-sputter in Application of Secondary Electron Emission Keyword MgO RF-SPUTTER DYNODE MgO RF-SPUTTER DYNODE Abstract Our purpose is to deposit MgO films by reactive R.F. sputtering deposition, we completed the dynode devices on INVAR substrates. Then the secondary electron emission yield of MgO film were measurement on the dynode structures. We successfully demonstrated that primary electron energy effect the curve of SEE yield according to previous study.
We found that the magnitude of the secondary electron emission (SEE) yield of the MgO films strongly depends on the film thickness, we ascribed it to the electric field through the insulating MgO layer. When the thickness of MgO films increased, the SEE yield δ also increase. And the maximum value of the SEE yield δ can be up to 7 at 180 nm MgO layer.
Advisor Committee none - advisor
none - advisor
none - co-chair
Files Date of Defense 2005-07-20 Date of Submission 2005-08-29