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Title page for etd-0829105-162600


URN etd-0829105-162600 Statistics This thesis had been viewed 3749 times. Download 1708 times.
Author Tai-wei Su
Author's Email Address stw311@yahoo.com.tw
Department Electro-Optical Engineering
Year 2004 Semester 2
Degree Master Type of Document Master's Thesis
Language English Page Count 60
Title Study of MgO Thin Film Grown by RF-sputter in Application of Secondary Electron Emission
Keyword
  • MgO RF-SPUTTER DYNODE
  • MgO RF-SPUTTER DYNODE
  • Abstract Our purpose is to deposit MgO films by reactive R.F. sputtering deposition, we completed the dynode devices on INVAR substrates. Then the secondary electron emission yield of MgO film were measurement on the dynode structures. We successfully demonstrated that primary electron energy effect the curve of SEE yield according to previous study. 
    We found that the magnitude of the secondary electron emission (SEE) yield of the MgO films strongly depends on the film thickness, we ascribed it to the electric field through the insulating MgO layer. When the thickness of MgO films increased, the SEE yield δ also increase. And the maximum value of the SEE yield δ can be up to 7 at 180 nm MgO layer.
    Advisor Committee
  • none - advisor
  • none - advisor
  • none - co-chair
  • Files indicate access worldwide
    Date of Defense 2005-07-20 Date of Submission 2005-08-29


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