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URN etd-0830106-130217 Statistics This thesis had been viewed 2900 times. Download 1102 times. Author I-Sheng Hwang Author's Email Address No Public. Department Materials Engineering Year 2005 Semester 2 Degree Master Type of Document Master's Thesis Language Chinese&English Page Count 88 Title The Study of AZO Transparent Conducting Thin Films
with Nano Au Particles
Keyword sol-gel AZO TCO TCO AZO sol-gel Abstract The goal of this study is to use sol-gel method and spin coating technique
to prepare ZnO：Al (AZO) thin films and to study the influence of Al
doping concentration and thermal treatment condition on the
electro-optical properties of AZO thin films. Au nano particles were also
added in hope to improve the optical-electrical properties of AZO thin
film. Zinc acetate dihydrate was used as a starting material in this
experiment. By adding different amounts of aluminum nitrate
nonahydrate as dopant and annealing in various temperatures, a minimum
resistivity of 4.613×10-2Ω-cm was obtained for the films doped with
1.5at% Al and annealing at 750℃ in Ar. A minimum resistivity of
1.289×10-3Ω-cm was obtained for the films which was doped with 2at%
Al and contained Au nano particles and annealed at 650℃ in Ar. The
incorporation of Au particles decreased two order of the resistivity of
AZO thin films and the optical transmittance was also decreased to 50-70%.
Advisor Committee Yung-Jen Lin - advisor
Mu-Rong Yang - co-chair
Sea-Fue Wang - co-chair
Files Date of Defense 2006-07-21 Date of Submission 2006-08-30