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Title page for etd-0830106-130217


URN etd-0830106-130217 Statistics This thesis had been viewed 2862 times. Download 1102 times.
Author I-Sheng Hwang
Author's Email Address No Public.
Department Materials Engineering
Year 2005 Semester 2
Degree Master Type of Document Master's Thesis
Language Chinese&English Page Count 88
Title The Study of AZO Transparent Conducting Thin Films
with Nano Au Particles
Keyword
  • sol-gel
  • AZO
  • TCO
  • TCO
  • AZO
  • sol-gel
  • Abstract The goal of this study is to use sol-gel method and spin coating technique
    to prepare ZnO:Al (AZO) thin films and to study the influence of Al
    doping concentration and thermal treatment condition on the
    electro-optical properties of AZO thin films. Au nano particles were also
    added in hope to improve the optical-electrical properties of AZO thin
    film. Zinc acetate dihydrate was used as a starting material in this
    experiment. By adding different amounts of aluminum nitrate
    nonahydrate as dopant and annealing in various temperatures, a minimum
    resistivity of 4.613×10-2Ω-cm was obtained for the films doped with
    1.5at% Al and annealing at 750℃ in Ar. A minimum resistivity of
    1.289×10-3Ω-cm was obtained for the films which was doped with 2at%
    Al and contained Au nano particles and annealed at 650℃ in Ar. The
    incorporation of Au particles decreased two order of the resistivity of
    AZO thin films and the optical transmittance was also decreased to 50-70%.
    Advisor Committee
  • Yung-Jen Lin - advisor
  • Mu-Rong Yang - co-chair
  • Sea-Fue Wang - co-chair
  • Files indicate access worldwide
    Date of Defense 2006-07-21 Date of Submission 2006-08-30


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