||In recent years, MEMS technology have been developed and applied in various kinds of fields, such as, optics, power, sensor, bioengineer and etc. However, with the improvement of quality of the life, people want to have better medical treatment. MEMS technology is applied by biotechnology such as PCR chip, detection chip, separated chip and etc.
This research is focus on biotechnology research in the separation of nano particles, we use the MEMS processing technology to design and produce a fast separation of nanol particles with the components, combined with quartz crystal microbalance to enable rapid detection of separation.
The separation of nano particles in the study, this paper proposes a 3D DEP (Dielectrophoretic) for the separation, which allows flow through the electrode surface after the samples were separated quickly. Course of the study using CFD ACE + software for 3D simulation of the electric field in the electric field distribution. Embedded technology by hot-embedding , the electrode embedded in the flow channel.
In the quartz crystal microbalance study, to design and produce a measurement of the vehicle. CNC machining to produce the traditional mold carrier, and then to measure the compression molding technology to complete the vehicle and the flow distribution. The quartz crystal microbalance proposed as one of the DEP electrodes, the DEP and the quartz crystal microbalance electrodes integrated into the vehicle in order to complete the separation of particles. Detection, the quartz crystal microbalance as a test platform to verify the separation efficiency.