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URN etd-0906112-163137 Statistics This thesis had been viewed 1337 times. Download 3 times. Author Kang-Shen Peng Author's Email Address No Public. Department Mechanical Engineering Year 2011 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 101 Title MECHANICAL OPTICAL AND BIOCOMPATIBLE PROPERTIES OF DIAMOND-LIKE CARBON FILMS BY PLASMA ENHANCED CHEMICAL VAPOR DESOPITION USING DIFFERENT ACETYLENE HYDROGEN MIXING RATIO Keyword biocompatibility optical properties diamond-like carbon films plasma enhanced chemical vapor deposition mechanical properties mechanical properties plasma enhanced chemical vapor deposition diamond-like carbon films optical properties biocompatibility Abstract The DLC films were deposited on silicon substrate using different acetylene and hydrogen mixing ratio by RF plasma enhanced chemical vapor deposition. The thickness and residual internal stress of the films were measured by surface profiler. The micro-structure of the films were examined by Raman spectroscopy. The surface roughness of the films were characterized by atomic force microscopy. The reflectivity , refractive index and extinction coefficient of the films were examined by MProbe system and ellipsometer. The sp3/sp2 value and hydrogen content of the films were measured by X photoelectron spectrometer. The contact angle of the films were calculated by contact angle meter and we can calculate surface energy later. The hardness and Young’s modulus of the films were analyzed by nano-indentation. Finally, we cultured human body ECV301 cells on the silicon substrates and evaluated the cell number for 48 and 72 hours.
The Raman results indicate that sp2 proportion in DLC films increases when H2/(C2H2+H2) ratio increases. It shows that the structure of the film tends graphitization. And the experimental results show hardness and Young's modulus increase with H2/(C2H2+H2) ratio from 0.9 to 0.6, but decrease from 0.6 to 0.4. We think that the film surface has been stripping occurs. In addition, with the reduction of H2/(C2H2+H2) ratio, the residual internal stress gradually increases from 1.122 Gpa to 1.537 GPa. In optics, the reflectance value of different acetylene and hydrogen mixing ratios ratio are about 13.5-16 %. And the values of the refractive index are 2.0-2.18 around and the values of the extinction coefficient is between 0.14-0.165. In the biocompatibility experiment, the ECV304 number that were cultured for 48 hours becomes slightly more trends. And we can found in the cell count of 72 hours that in addition to H2/(C2H2+H2) ratio of 0.9, 0.8 and 0.6, the cell adhesion amount of the other three groups are showing a decreasing trend.
Advisor Committee Chehung Wei - advisor
Ko-Shao Chen - co-chair
Rwei-Ching Chang - co-chair
Files Date of Defense 2012-07-26 Date of Submission 2012-09-07