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URN etd-0907111-140941 Statistics This thesis had been viewed 1925 times. Download 1088 times. Author Ting-Long Hsu Author's Email Address No Public. Department Mechanical Engineering Year 2010 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 59 Title Investigation on Pseudo-LFE Acoustic Wave Sensors of Various Piezoelectric Substrates Keyword FEM Lithium niobate Pseudo-LFE acoustic wave sensor Pseudo-LFE acoustic wave sensor Lithium niobate FEM Abstract Pseudo lateral field excited (Pseudo-LFE) acoustic wave sensors of AT-cut quartz are more sensitive to liquid electric properties than quartz crystal microbalance (QCM) and can resonate stably in air, which improves the drawback of lateral field excited (LFE) acoustic wave sensors. In this thesis, the three devices based on 128°Y and YZ Lithium niobate (LiNbO3) plates are investigated theoretically and experimentally. Results of the extended Christoffel-Bechmann method show that 128°Y LiNbO3 has higher phase velocity and LFE coupling constant than YZ LiNbO3. On the contrary, 128°Y LiNbO3 has smaller thickness field excited coupling constant than YZ LiNbO3. In COMSOL simulations and experiments, the sensitivities of the devices to liquid electrical and mechnical properties are calculated, measured and further compared. As a result, Pseudo-LFE acoustic wave sensors of LiNbO3 plate are highly appropriate for liquid sensing applicatons, and especially the 128°Y LiNbO3 Pseudo-LFE sensor is more sensitive to liquid electric properties than YZ LiNbO3. Advisor Committee Yung-Yu Chen - advisor
Jra-Hong Sun - co-chair
Shin-Yung Pao - co-chair
Files Date of Defense 2011-07-27 Date of Submission 2011-09-07