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Title page for etd-0907115-105502


URN etd-0907115-105502 Statistics This thesis had been viewed 839 times. Download 1 times.
Author Shing-Yu Peng
Author's Email Address No Public.
Department Materials Engineering
Year 2014 Semester 2
Degree Master Type of Document Master's Thesis
Language zh-TW.Big5 Chinese Page Count 99
Title Wettability of Artificial Graphites after Plasma Treatment and Amorphous Carbon Films Synthesized by Plasma Enhanced Chemical Vapor Deposition
Keyword
  • wettability)
  • ( amorphous carbon films
  • RF plasma enhanced chemical vapor deposition
  • contact angle
  • contact angle
  • RF plasma enhanced chemical vapor deposition
  • ( amorphous carbon films
  • wettability)
  • Abstract Wettability is an important property to be considered in several applications for amorphous carbon films. Radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) was used to deposit amorphous carbon films with different structure and hydrogen contents using different deposition work and hydrogen contents using methane and acetylene at different CH4/H2 and C2H2/H2 ratios. The influences of deposition work and hydrogen content on the water contact angle (WCA) were investigated. Finally, the surfaces of carbon films and artificial graphites (IG11) were modified by H2 plasma and O2 plasma treatments at different treatment times, and their effects on WCA were studied. Experimental results showed that the WCA of carbon films decreased with increasing deposition work up to 40W, then increased from 40W to 95W. Since the roughness of the carbon films was less than 5nm, the main parameter affecting the WCA is the bonding type. When ion energy is low, the carbon films are mostly composed of C-H bond, the films are polymer-like and the contact angle is large. In contrast, when larger ion incidence energy is used, the carbon films have larger sp3/sp2 ratio and better mechanical properties, but the WCA increases due to the surface structure transition from sp3 to sp2 resulting from the high temperature due to high power. For the carbon films deposited using CH4/H2 and C2H2/H2, more C-H bonding can be formed and the number of dangling bond is reduced, leading to lower surface energy and a higher WCA. For the oxygen plasma post-treatment on carbon films and artificial graphites, the superhydrophilic characteristic was fond after the treatment, then the WCA increased with time. Finally, the superhydrophobic characteristic was observed after several days with a WCA as high as 130°.
    Advisor Committee
  • Shinn-Shyong Tzeng - advisor
  • Ting-Yu Wu - co-chair
  • Ya-Ko Chih - co-chair
  • Files indicate in-campus access only
    Date of Defense 2015-07-29 Date of Submission 2015-09-07


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