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URN etd-0910110-193833 Statistics This thesis had been viewed 2338 times. Download 937 times. Author Yu-Guang Hu Author's Email Address No Public. Department Materials Engineering Year 2009 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 117 Title Effects of intermediate plasma treatment and hydrogen content on mechanical properties and wear behavior of diamond-like carbon films Keyword DLC plasma treatment plasma treatment DLC Abstract Diamond-like carbon (DLC) films were deposited on silicon substrate using a methane/hydrogen gas mixture by RF plasma enhanced chemical vapor deposition (RF-PECVD). The effects of deposition time, intermediate plasma treatment time, plasma post-treatment time and chamber cooling were investigated. The film thickness, surface curvature and microstructure of DLC films were characterized by Alpha-Step profilometer, Fizeau interferometer and Raman spectroscopy, respectively. The surface hardness, Young’s Modulus and roughness were analyzed by nano-indentation and atomic force microscopy (AFM). In addition, the wear behavior of DLC films deposited at different CH4/H2 ratios was studied by using different wear loads and time. The experimental results indicate that larger internal stress was measured in the beginning of deposition and then the internal stress decreased and remained relatively constant. The Raman results indicate that sp2 proportion in DLC films increased when the deposition time increased, indicating the graphite-like tendency in DLC films. Under the same plasma treatment conditions, significant decrease of internal stress was found for plasma post-treatment, while no significant effect of intermediate plasma treatment on the internal stress could be measured. For the results of chamber cooling, increase of deposition rate and decrease of internal stress were measured. Under fixed deposition time, as the proportion of H2 increased, the surface roughness and sp2 content increased, while the deposition rate decreased. Internal stress increased with increasing hydrogen content upto H2/CH4=10/10 and then decreased. For the hardness, the maximum value occurred at H2/CH4=0/20. Advisor Committee Tzeng, Shinn-Shyong - advisor
Jong-Shum Hsu - co-chair
Ya-Ko Chih - co-chair
Files Date of Defense 2010-07-30 Date of Submission 2010-09-10