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URN etd-0913116-131001 Statistics This thesis had been viewed 564 times. Download 60 times. Author Wei-Han Hsia Author's Email Address No Public. Department Mechanical Engineering Year 2015 Semester 2 Degree Master Type of Document Master's Thesis Language zh-TW.Big5 Chinese Page Count 68 Title A Piezoelectric Toluene Sensor Based on TiO2 Nano Particles Keyword piezoelectric titanium dioxide nano-particles toluene sensor Lithium Niobate Lithium Niobate toluene sensor titanium dioxide nano-particles piezoelectric Abstract This thesis aims to develop a low-cost but high-sensitivity toluene sensor
which can be operated at room temperature. First, the characteristics of Lithium Niobate bulk acoustic wave is calculated based on Christoffel formula, and further the cut angle and electric field direction are determined for attaining high piezoelectric coupling coefficient. A dual delay line system is configured to reduce the environmental interference; the system is composed of two Pierce oscillators, a mixer, and a low-pass filter. The commercially available titanium dioxide nano-particles are prepared as the sensing material of toluene. The nano-particles are coated uniformly on the Lithium Niobate wafer by spin coating. The X-ray diffraction (XRD) and field emission gun scanning electron microscopy (FEG-SEM) are utilized for the characteristic evaluation of the titanium dioxide nano-particles. Finally, air and toluene of different concentrations are injected into the 500 mL chamber by turns at a flow rate of 400 c.c./min. The results show the frequency shift on toluene of 25, 50, 100, 150, and 200 ppm are 11.3, 39.6, 53.1, 78.7, and 111.2 Hz, respectively. The sensor developed in the study is confirmed to detect toluene successfully at room temperature.
Advisor Committee Yung-Yu Chen - advisor
Ching-Chih Tai - co-chair
Shih-Yung Pao - co-chair
Files Date of Defense 2016-07-29 Date of Submission 2016-09-13