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URN etd-1022104-145134 Statistics This thesis had been viewed 3418 times. Download 1378 times. Author Chao-Hui Shu Author's Email Address No Public. Department Electro-Optical Engineering Year 2003 Semester 2 Degree Master Type of Document Master's Thesis Language English Page Count 50 Title An analysis on the property of surface acoustic wave propagation in the LiNbO3 thin film with Layered structures Keyword ZnO LiNbO3 AlN AlN LiNbO3 ZnO Abstract In this thesis , we will discuss the variation by of the characteristics simulating the LiNbO3/Buffer/Si structures to gain the phase velocity and electromechanical coupling coefficient.
LiNbO3 was used popularly in a lot kinds of cut and modulus, because there are many different phase velocity and electromechanical coupling coefficient combinations in different cut and modulus. So in this thesis , we will focus on the LiNbO3 thin film. By the references [4-55], we will select four different kinds of buffer layer materials which is AlN、ZnO for the piezoelectric materials and Al2O3、SiO2 for the non-piezoelectric materials to get the better characteristics for the growing high-quality LiNbO3 thin films. We will use the silicon substrate for the integration of SAW with the maturing Si-based semiconductor devices.
Advisor Committee Wen-Ching Shih - advisor
Mu-Shiang Wu - co-chair
Files Date of Defense 2004-07-29 Date of Submission 2004-10-22